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BRANDS > ULVAC > Dry-running screw vacuum pumps

Dry-running screw vacuum pumps ULVAC


Lidická kolonie 47
586 01 Jihlava

Phone: +420 567 322 487
Service: +420 567 330 556


ULVAC dry-running vacuum pumps are suitable for industrial and laboratory applications.

VAKUUM BOHEMIA, s.r.o. services:

  • vacuum systems with dry-running vacuum pumps
  • sale of the ULVAC dry-running screw vacuum pumps
  • sale of spare parts and accessories
  • on-site servicing
  • repairs and refurbishing of the ULVAC dry-running vacuum pumps

Support for servicing ULVAC vacuum technologies:

  • a team of service technicians
  • a team of engineers for designing vacuum systems
  • spare parts warehouse
  • storage of accessories and other parts
  • testing and measuring equipment for vacuum pumps
  • industrial washing tools for environmentally friendly cleaning of vacuum pumps

We offer the following series of the dry-running screw vacuum pumps:

Suchoběžné šroubové vývěvy ULVAC série LS










ULVAC LS series dry-running screw vacuum pumps

ULVAC LS is an innovative dry-running screw vacuum pump that features a pair of conically shaped steel screws with variable pitch, which allows for pumping even near atmospheric pressure. The vacuum pump is up to 1/3 lighter than a conventional screw vacuum pump and is designed primarily for clean applications. However, it can also serve as a vacuum pre-pump.

It is available in 4 models with pumping speeds of 120 to 1,200 m3/h.

Key benefits of the LS series include:

  • noise level below 61 dB (A)
  • light weight and smaller dimensions
  • high pumping speed near atmospheric pressure drastically reduces pumping time.
  • integrated built-in shock absorber of the ECO-SHOCK technology
  • low power consumption

Use for clean processes (type "C"):

  • pumping air or nitrogen.
  • load-lock chambers
  • lamination
  • vacuum steaming
  • vacuum sputtering

Use for light processes (type "L"):

  • pumping steam and heavy gases
  • general industrial processes
  • laboratory applications
  • freezing
  • vacuum drying


Suchoběžné šroubové vývěvy ULVAC série CR







ULVAC dry-running screw vacuum pumps of the CR series

ULVAC CR are air-cooled, dry-running vacuum pumps designed for clean and wet processes. The devices can extract up to 500 g/h of steam (or pure gas). These properties make them suitable as a vacuum source for vacuum dryers, sputtering equipment and evaporation systems.

Key benefits of the CR Series include:

  • compact design
  • air cooling
  • low operating cost
  • light weight
  • integrated silencer

Applications and use in real life:

  • steam pumping
  • pumping of pure gases
  • vacuum drying equipment
  • vacuum coating equipment
  • vacuum sputtering
  • rotary evaporators


Suchoběžné šroubové vývěvy ULVAC série LR/HR/UR









ULVAC dry-running screw vacuum pumps of the LR/HR/UR series

The ULVAC LR/HR and UR series vacuum pumps are specially designed dry-running vacuum pumps for applications where heated vacuum or exhaust piping is required. For this capability, it is suitable for PVD processes and CVD coating. They can also serve as support vacuum pumps for turbo and mechanical booster vacuum pumps.

Key benefits of the LR/HR/UR series include:

  • high degree of surface hardness
  • excellent corrosion resistance
  • excellent helium pumping ability
  • enclosed electric motor
  • easy maintenance
  • withstands power interruptions for up to 500 ms

Applications and use in real life:

  • PVD etching processes (LR series)
  • CVD dry etching processes (HR series)
  • Bridgman method
  • heat treatment processes
  • processing of procedural gases


Zařízení pro úsporu energie ULVAC ECO-SHOCK

ULVAC ECO-SHOCK energy-saving device

ECO-SHOCK is an accessory for dry-running vacuum pumps for the ULVAC LR / HR / UR models. The device can reduce energy consumption by up to 80%. It supports pumping of air, nitrogen and inert gases, such as argon. It connects to the exhaust pipes.

Key benefits of this accessory include:

  • up to 80% reduction in energy consumption of the dry-running vacuum pumps
  • no reduction in the working performance of the vacuum pump
  • easy installation


Lidická kolonie 47
586 01 Jihlava
  Tel: +420 567 322 487
Fax: +420 567 330 560
Tel. services: +420 567 330 556
Urgent matters outside office hours: +420 602 806 203

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