Turbomolecular oil vacuum pumps and systems
CONTACT
Lidická kolonie 47
586 01 Jihlava
Phone: +420 567 322 487
Service: +420 567 330 556
E-mail: info@vakuum-bohemia.cz
Welch turbomolecular vacuum pumps are used to produce high vacuum (HV) and ultra-high vacuum (UHV) up to a limit pressure of 1x10-10 mbar with high pumping speeds.
In addition to the standard SST series turbomolecular vacuum pumps, we offer turbomolecular pump systems in a housing (CDK series), as well as mobile versions with a two-stage oil rotary vacuum pre-pump or diaphragm vacuum pump (STP series).
Principle of turbomolecular oil vacuum pumps
Turbomolecular vacuum pumps move gas molecules by giving them a mechanical impulse. The very fast rotating blades knock the gas molecules to lower stages. The compression ratio (i.e., the pressure difference) at the input and outlet is small, so it is necessary to implement several stages in succession and use the highest possible speed (more than 30,000 min-1).
The vacuum pumps require pre-pumping, which can be provided by two-stage oil vacuum pumps or single-stage vacuum pumps in combination with a Roots vacuum pump. The pumps are suitable for creating high and ultra-high vacuum. Turbomolecular vacuum pumps are an alternative to diffusion vacuum pumps, compared to which they have the advantage of a "clean" vacuum (free of oil vapors).
We offer the following 2 types of turbomolecular systems:
CDK compact turbomolecular pumping systems
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These are complete vacuum pumps for generating high vacuum and ultra-high vacuum. CDK systems are characterized by their compact design and user-friendly vacuum system control. All individual components of the vacuum system have been carefully designed for this function. SST turbomolecular vacuum pumps are equipped with hybrid rolling bearings (ceramic balls) with solid lubrication to prevent negative pressures, contamination with fats, oils or their decomposition products. This means that the design eliminates the residual hydrocarbon gas spectrum. All CDK turbomolecular pump systems have an automatic shutdown mechanism for the vacuum pre-pump. The vacuum pre-pump is automatically turned off when the maximum pressure is reached in the vessel. The solenoid valve, in the front vacuum pipe on the turbo pump, closes at the same time. This prevents reverse venting of the turbomolecular pump and vessel. Their key characteristics include:
The operating cost for energy consumption is reduced, which is particularly noticeable when using several CDK turbomolecular vacuum pumps. |
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Mobile turbomolecular pumping systems STP
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These mobile units are designed for a fast generation of high vacuum. The turbomolecular vacuum pump, regulator and vacuum gauges are mounted on a central aluminum profile column at the optimal working height. The vacuum pre-pump is fixed on a mobile base plate, to which the profile column is also attached. The vacuum device (vessel) can either be flange-mounted directly to the suction opening of the turbomolecular vacuum pump, or the vacuum pump can be removed from the holder on the profile column and connected directly to the vessel. The mobility of the system allows it to be placed as close to the chamber as possible, meaning only short vacuum times are needed. The short vacuum line ensures low flow losses and consequently high pumping speeds from the vessel. All STP/D turbomolecular vacuum pumps have an automatic shutdown mechanism for the front vacuum diaphragm vacuum pump. The pre-vacuum combination is switched off when the maximum pressure is reached in the vessel. At the same time, the solenoid valve, in the front vacuum line on the turbomolecular vacuum pump, is closed. This prevents reverse venting of the vacuum pump and vessel. The key advantages of this system include:
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Mobile turbomolecular vacuum pump systems include:
- SST turbomolecular vacuum pumps with integrated low vacuum stage.
- Type systems of the STP vacuum pumps: Oil combined two-stage rotary vacuum pump and diaphragm vacuum pump for condensation elimination.
- Type systems of the STP/D vacuum pumps: MP 601 T dry-running three-stage diaphragm vacuum pump.
- Front vacuum gauge MRV 100 with measuring sensor CAP 121 for automatic shutdown (for the STP/D type).
- Solenoid valve in the front vacuum line on the turbomolecular vacuum pump (for the STP/D type).
- Aluminum profile pillar with fastening elements, mounted on a mobile base plate.
Table of the CDK series models
| Model | Pumping speed [m3/h] | Max. vakuum [mbar] | Wattage [kW] | Connection | RPM | Weight [kg] | Size [(l x w x h) mm] |
|---|---|---|---|---|---|---|---|
| CDK 240 | 50 | 0,0000005 | N/A | KF 40 | N/A | 15 | 193 x 344 x 400 |
| CDK 240 UHV | 50 | 0,00000005 | N/A | KF 40 | N/A | 15 | 193 x 344 x 400 |
| CDK 263 | 77 | 0,0000005 | N/A | ISO-K 63 | N/A | 15 | 193 x 344 x 400 |
| CDK 263 UHV | 77 | 0,00000005 | N/A | ISO-K 63 | N/A | 15 | 193 x 344 x 400 |
| CDK 240/1 | 50 | 0,0000005 | N/A | KF 40 | N/A | 16 | 193 x 344 x 400 |
| CDK 240/1 UHV | 50 | 0,00000005 | N/A | KF 40 | N/A | 16 | 193 x 344 x 400 |
| CDK 263/1 | 77 | 0,0000005 | N/A | ISO-K 63 | N/A | 15 | 193 x 344 x 400 |
| CDK 263/1 UHV | 77 | 0,00000005 | N/A | ISO-K 63 | N/A | 15 | 193 x 344 x 400 |
Table of the STP series models
| Model | Pumping speed [m3/h] | Max. vakuum [mbar] | Wattage [kW] | Connection | RPM | Weight [kg] | Size [(l x w x h) mm] |
|---|---|---|---|---|---|---|---|
| STP 1.1 | 250 | 0,0000005 | N/A | ISO-K 63 | N/A | 20 | 480 x 500 x 700 |
| STP 5.1 | 900 | 0,0000005 | N/A | ISO-K 100 | N/A | 25 | 480 x 500 x 700 |
| STP D1.1 | 250 | 0,0000005 | N/A | ISO-K 63 | N/A | 20 | 480 x 500 x 700 |
| STP D5.1 | 900 | 0,0000005 | N/A | ISO-K 100 | N/A | 25 | 480 x 500 x 700 |
VAKUUM BOHEMIA, s.r.o. services:
- Service of the vacuum technology at the customer's site
- Repairs and refurbishing of the turbomolecular vacuum pumps
- Design and delivery of turbomolecular vacuum systems
- Training in the field of vacuum solutions
Service of vacuum technologies:
- Sale of turbomolecular vacuum pumps and vacuum technologies
- Rental of turbomolecular vacuum pumps and systems
- Sale of accessories (silencers, filters and frequency converters)
- Consulting in the field of vacuum technologies
Use of turbomolecular vacuum pumps and systems in real life:
- The set is capable of generating high and ultra-high vacuum and is therefore also used in metallurgy, where it is applied in processes such as vacuum etching, sputtering and steaming.
- In the brewing and malting industry, these technologies are utilized in analytical testing laboratories, where they are used to perform a range of analytical analyses.
- In the field of nanotechnology and semiconductor manufacturing, this technology is applied to electron microscopy (SEM, TEM), Focused Ion-Beam (FIB) systems and surface analysis techniques.
- Vacuum pumps usually form a part of detection equipment where a deep vacuum is needed for moisture removal.
- Mass spectrometers use two-stage vacuum systems. The first stage is provided by a rotary oil vacuum pump and the second one can be provided by a turbomolecular vacuum pump.
- The implementation of nanotechnology and the diagnosis of its products requires the creation of a low-pressure and, in many cases, deep vacuum environment. This can be generated by turbomolecular oil vacuum pumps and systems.
- For surface treatment of organic and mineral glass lenses, a vacuum of up to 10-4 Pa needs to be created. Turbomolecular and diffusion vacuum pumps are used for pumping here.